Spectrometers for Extreme UHV-VUV-UV

(Vacuum Range)

Spectrometer Characteristics
F/L, m	Model	F/ no.	Resol, nm	Optical System	Spectrum, nm
0.2	251	14h	0.05	Toridal Grating Grazing	10-170
1.0	248/310	49.9h	0.018	Grazing Incidence	<1-310
1.5	252/315	50.0h	0.015	Grazing Incidence	<1-90
2.2	247	42.6h	0.008	Grazing Incidence	<1-254
3.0	249	60.0h	0.006	Grazing Incidence	<1-240
10.6	262	71.1h	0.0016	Grazing Incidence	<3-72.5

Resolution given is for a system using a 1200 G/mm grating.

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