Junguo Ran, Li Gou, Changqiong Zheng, Yang Cao and Fanghu Wang

Sichuan Union University, Chengdu, 610065, China
suucust@rose.cnc.ac.cn

Diamond-like carbon film (DLC) as an advanced material has been used in the mechanics, optics and electronics fields because of its excellent mechanical, optical, biological and electronic properties. In practical application, DLC having great hardness, wear-resistance and good biological properties is directly coated on metal of metal alloy in most cases. Not only the advantages of high strength and flexibility of metal remain, but also the DLC coating on metal surface exhibits better great mechanical and biological properties. It is a new way to prepare novel function material. But because the heat expansion coefficient of DLC is very different from that of metal, so the great thermal stress of film and poor adhesion due to temperature differential during preparation and application of DLC coating have affected the application of the new material. Therefore, the adhesion of DLC to metal substrate is important. The intermediate layer which heat expansion coefficient is between that of DLC and metal was used to moderate thermal stress in before. This paper presents that constitution and structure of gradient material are changed gradually to moderate thermal stress and increase adhesion. Novel DLC/SiC gradient material has been designed. In order to prepare DLC/SiC gradient material having good properties and meeting the specification with designing, microwave plasma was used because of its high frequency, strong activation, fast deposition rate. The processing conditions along with structure and properties of several films which consist of gradient material were investigated, among which adhesion and wear-resistance were discussed more. The DLC/SiC gradient material having excellent adhesion will be used extensively.