Deng Xinlu, Wang Yanping, Lu Wenqi, Zhang Jialiang and Ma Tencai

National Laboratory of Materials Modification by Electron, Ion and Laser Beams
Dalian 116024, P. R. China
xldeng@dlut.edu.cn

In the process of plasma source ion nitriding (PSIN), the temperature of the work-piece is the most important factor. We controlled the temperature of the work-piece by adjusting the amplitude, frequency and duty ratio of the bias pulses on the work-piece using a microcomputer. The experimental set-up, some special circuits and a program flow chart used for nitriding were introduced. Some stainless steel samples were nitrided under different temperature, and nitrided samples were tested by Auger analysis, glancing X-ray diffractogram, X-ray Photoelectrn Spectroscopy and TEM. We also discussed the industrial uses of the computer-controlled PSIN.