Tae-Hun Chung, Hyun-Jin Yoon, Jung-Soon Lee, Dong-Choe Seo and Jae-Koo Lee*

Dong-A University, Pusan Korea
*Pohang University of Science and Technology, Pohang Korea
thchung@plasma.donga.ac.kr

For radio-frequency discharges of electronegative gases, the scaling formulae of the plasma variables in terms of the control parameters are derived. The control parameter space consists of gas pressure, system length and absorbed power (or electron density). A comprehensive parameter space is constructed for classifying the operating regimes. The classifications are performed according to the prevailing particle loss mechanism (recombination loss dominated or ion flux loss dominated) and the main heating mechanism (Ohmic heating dominated or stochastic heating dominated). The scaling laws for various operating regimes are determined based on a one-dimensional equilibrium model, and compared with results obtained from various simulation methods (global model, fluid model, particle-in-cell simulation). In addition, some charateristics of electronegative discharge plasmas are discussed.